Semiconductors may be small, but the impacts they have are significant. Semiconductors used in life-dependent applications, such as pacemakers, defibrillators, life support systems, automotive safety ...
Asymmetries in wafer map defects are usually treated as random production hardware defects. For example, asymmetric wafer defects can be caused by particles inadvertently deposited on a wafer during ...
San Jose, Calif. – June 4, 2009 – Novellus Systems (NASDAQ: NVLS) has developed a sub-45nm, in-situ chamber clean process on the SPEED Max High Density Plasma (HDP) CVD gapfill platform that ...